CMOS integrated nanocrystalline SnO2 gas sensors for CO detection

被引：5

作者：

Lackner, E. ^{[1
]}

Krainer, J. ^{[1
]}

Wimmer-Teubenbacher, R. ^{[1
]}

Sosada, F. ^{[1
]}

Gspan, C. ^{[2
]}

Rohracher, K. ^{[3
]}

Wachmann, E. ^{[3
]}

Koeck, A. ^{[1
]}

机构：

[1] Mat Ctr Leoben Forsch GmbH, Roseggerstr 12, A-8700 Leoben, Austria

[2] Inst Elect Microscopy & Fine Struct Res, Steyrergasse 17-111, A-8010 Graz, Austria

[3] Ams AG, Tobelbaderstr 30, A-8141 Premstatten, Austria

来源：

PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016 | 2016年 / 168卷

关键词：

CMOS integration; gas sensors; tin dioxide ultrathin film; microhotplates; carbon monoxide;

D O I：

10.1016/j.proeng.2016.11.200

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, we present gas sensors based on nanocrystalline SnO2 ultrathin films, which were integrated on microhotplate chips fabricated by CMOS technology. The gas sensitive films, with a thickness of 50 nm, were deposited on the microhotplate by a spray pyrolysis process. The CMOS integrated sensor resistance was significantly decreased in the presence of carbon monoxide. A sensor response of up to 50% is achieved at an operating temperature of 375 degrees C. The microhotplate chips presented here enable 3D integration of different gas sensing systems by through-silicon-via technology. Such 3D-integrated nanosensors are promising candidates for building smart gas sensor devices for daily life applications. (C) 2016 The Authors. Published by Elsevier Ltd.

引用

页码：297 / 300

页数：4

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