The structural and electrical properties of Mn-doped Ba0.6Sr0.4TiO3 films prepared by metal organic deposition method

被引:10
作者
Wang, Xiaofei [1 ,3 ]
Lv, Shijie [1 ,3 ]
Zhang, Chao [1 ,3 ]
Hu, Qiubo [2 ]
Li, Liben [1 ,3 ]
机构
[1] Henan Univ Sci & Technol, Sch Phys & Engn, Luoyang 471023, Peoples R China
[2] Luoyang Inst Sci & Technol, Dept Math & Sci, Luoyang 471023, Peoples R China
[3] Luoyang Key Lab Photon & Elect Mat, Luoyang 471023, Peoples R China
关键词
BST film; Dielectric properties; Tunability; BARIUM STRONTIUM-TITANATE; TUNABLE MICROWAVE DEVICES; BA1-XSRXTIO3; THIN-FILMS; DIELECTRIC-PROPERTIES; CERAMICS; IMPROVEMENT;
D O I
10.1016/j.jallcom.2013.04.154
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Both undoped and Mn-doped BST films are fabricated on (1 1 1) Pt/Ti/SiO2/Si by metal organic deposition. X-ray diffraction and atomic force microscopy reveal the microstructure of the samples. The effect of Mn dopant on structural and electrical properties is studied. It is found that the dc leakage behavior and dielectric loss of the BST films are greatly improved due to the change of the valence state of Mn ions. Meanwhile, the tunability of Mn-doped BST films is suppressed, and the possible causes of tunability dependence are discussed. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:262 / 264
页数:3
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