Both undoped and Mn-doped BST films are fabricated on (1 1 1) Pt/Ti/SiO2/Si by metal organic deposition. X-ray diffraction and atomic force microscopy reveal the microstructure of the samples. The effect of Mn dopant on structural and electrical properties is studied. It is found that the dc leakage behavior and dielectric loss of the BST films are greatly improved due to the change of the valence state of Mn ions. Meanwhile, the tunability of Mn-doped BST films is suppressed, and the possible causes of tunability dependence are discussed. (C) 2013 Elsevier B.V. All rights reserved.
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USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Cole, MW
Hubbard, C
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Hubbard, C
Ngo, E
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Ngo, E
Ervin, M
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Ervin, M
Wood, M
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Wood, M
Geyer, RG
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
机构:
USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Cole, MW
Hubbard, C
论文数: 0引用数: 0
h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Hubbard, C
Ngo, E
论文数: 0引用数: 0
h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Ngo, E
Ervin, M
论文数: 0引用数: 0
h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Ervin, M
Wood, M
论文数: 0引用数: 0
h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Wood, M
Geyer, RG
论文数: 0引用数: 0
h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA