ELECTRICAL STABILITY AND PIEZORESISTIVE PROPERTIES OF DIAMOND LIKE CARBON

被引：0

作者：

Bulota, V. ^{[1
]}

Vasiliauskas, A. ^{[1
]}

Meskinis, S. ^{[1
]}

机构：

[1] Kaunas Univ Technol, Dept Phys, LT-51368 Kaunas, Lithuania

来源：

RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2012 | 2012年

关键词：

diamond like carbon; electrical stability; piezoresistive;

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

This paper reports on an investigation of the electrical stability and piezoresistive properties of hydrogenated diamond like carbon fabricated by ion beam deposition using closed drift ion source technique. It was proposed that DLC thin films electrical instabilities arise from resistivity relaxation or degradation. Furthermore resistive heating plays significance role. The piezoresistive measurements show that hydrogenated diamond like carbon can be good material for novel type sensors formation.

引用

页码：213 / 215

页数：3

共 6 条

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