Athermal silicon waveguides with bridged subwavelength gratings for TE and TM polarizations

被引：32

作者：

Ibrahim, Marc ^{[1
]}

Schmid, Jens H. ^{[2
]}

Aleali, Alireza ^{[1
]}

Cheben, Pavel ^{[2
]}

Lapointe, Jean ^{[2
]}

Janz, Siegfried ^{[2
]}

Bock, Przemek J. ^{[2
]}

Densmore, Adam ^{[2
]}

Lamontagne, Boris ^{[2
]}

Ma, Rubin ^{[2
]}

Xu, Dan-Xia ^{[2
]}

Ye, Winnie N. ^{[1
]}

机构：

[1] Carleton Univ, Dept Elect, Ottawa, ON K1S 5B6, Canada

[2] Natl Res Council Canada NRC, IMS, Ottawa, ON, Canada

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 16期

关键词：

ON-INSULATOR;

D O I：

10.1364/OE.20.018356

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, athermal silicon waveguides using bridged subwavelength grating (BSWG) structures are proposed and investigated. The realization of temperature-independent BSWG waveguides for both polarizations is demonstrated numerically and experimentally. SU-8 polymer is used as the cladding material to compensate for the positive thermo-optic (TO) coefficient (dn/dT) of silicon. We investigate the dependence of the effective TO coefficient of BSWG waveguides on both the bridge width and grating duty cycle. The BSWG waveguides have a width of 490 nm, a height of 260 nm, and a grating pitch of 250 nm. Athermal behavior is achieved for both the transverse-magnetic (TM) and the transverse-electric (TE) polarized light for a variety of bridge width and duty cycle combinations. Furthermore, the BSWGs can be designed to be athermal for both TE and TM polarization simultaneously. (C) 2012 Optical Society of America

引用

页码：18356 / 18361

页数：6

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