A compact serial RF MEMS switch for S-band application

被引：0
|
作者：
Hu, XD [1 ]
Lumiao [1 ]
Hou, MH [1 ]
He, QG [1 ]
Gao, CZ [1 ]
Bai, XW [1 ]
Zhao, ZP [1 ]
机构：
[1] Hebei Semicond Res Inst, Shijiazhuang 050051, Peoples R China
来源：
SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS | 2001年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reviews the recently progresses in MEMS for radio frequency (RF) switch. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was present in details. Performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.
引用
收藏
页码：733 / 738
页数：6
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