Mechanical properties of a-C, SiC and Ti-C:H films

被引：2
|
作者：
Ctvrtlik, Radim [1 ,2 ,3 ]
Stranyanek, Martin [1 ,2 ,3 ]
Bohac, Petr [1 ]
Kulikovsky, Valeriy [1 ,4 ]
Suchanek, Jan [5 ]
机构：
[1] Acad Sci Czech Republic, Inst Phys, Prague 18221 8, Czech Republic
[2] Acad Sci Czech Republic, Inst Phys, Olomouc, Czech Republic
[3] Palacky Univ, Joint Lab Opt, CR-77147 Olomouc, Czech Republic
[4] Ukrainian Acad Sci, Inst Problems Mat Sci, Kiev, Ukraine
[5] Czech Tech Univ, Fac Mech Engn, Mfg Technol Dept, CR-16635 Prague, Czech Republic
来源：
INTERNATIONAL JOURNAL OF MATERIALS RESEARCH | 2008年 / 99卷 / 08期
关键词：
diamond-like carbon; nanoindentation; coating/substrate system;
D O I：
10.3139/146.101711
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
a-C, a-SiC and Ti-C:H coatings were deposited oil two steel substrates with different hardness by magnetron Sputtering. Their mechanical properties were investigated by depth sensing indentation and dry sliding testing. Load-displacement curves were obtained using a NanoTest(TM) NT600 instrument equipped with a Berkovich indenter. The depth profiles of the mechanical properties (indentation hardness H, effective modulus E(eff), and also H/E(eff) and H(3)/E(eff)(2) ratios) on both sub strates are presented. The goal of this article is to compare the dependence of the real response of a coating/substrate system oil the substrate. Regardless of substrate type the highest and the lowest values of hardness and modulus belong to a-C and Ti-C:H films, respectively.
引用
收藏
页码：871 / 875
页数：5
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