Realizing 2D Materials Via MOCVD

被引：2

作者：

Briggs, Natalie ^{[1
]}

Subramanian, Shruti ^{[1
]}

Lin, Yu-Chuan ^{[1
]}

Eichfeld, Sarah ^{[1
]}

Jariwala, Bhakti ^{[1
]}

Bhimanapati, Ganesh ^{[1
]}

Zhang, Kehao ^{[1
]}

Robinson, Joshua A. ^{[1
]}

机构：

[1] Penn State Univ, Ctr Atomically Thin Multifunct Coatings & 2D Crys, Dept Mat Sci & Engn, Ctr 2D & Layered Mat, University Pk, PA 16802 USA

来源：

SIGE, GE, AND RELATED MATERIALS: MATERIALS, PROCESSING, AND DEVICES 7 | 2016年 / 75卷 / 08期

基金：

美国国家科学基金会;

关键词：

CHEMICAL-VAPOR-DEPOSITION; WS2; THIN-FILMS; EPITAXIAL GRAPHENE; SINGLE-LAYER; MOS2; DISULFIDES; MOLYBDENUM; SHEETS; CVD;

D O I：

10.1149/07508.0725ecst

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

This manuscript presents a brief review of previous works related to synthesis of 2D materials via metal-organic chemical vapor deposition. Additionally, synthesis of heterostructures based on tungsten diselenide and epitaxial graphene are discussed.

引用

页码：725 / 731

页数：7

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