Monitoring of focus position during laser processing based on plasma emission

被引：22

作者：

Diego-Vallejo, D. ^{[2
,3
]}

Ashkenasi, D. ^{[1
]}

Eichler, H. J. ^{[2
]}

机构：

[1] Laser & Med Technol Berlin GmbH, Fabeckstr 60-62, D-14195 Berlin, Germany

[2] Tech Univ Berlin, Inst Opt & Atomare Phys, D-10623 Berlin, Germany

[3] Inst Politecn Nacl, Mexico City 07738, DF, Mexico

来源：

LASERS IN MANUFACTURING (LIM 2013) | 2013年 / 41卷

关键词：

Laser processing; plasma emission monitoring; laser-induced breakdown spectroscopy; focus position; INDUCED BREAKDOWN SPECTROSCOPY;

D O I：

10.1016/j.phpro.2013.03.166

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effects of lens-to-sample distance on plasma emission induced during laser processing were investigated. For tight focusing conditions, a local minimum value of emission intensity was observed for opaque materials. It was attributed to a reduction of ablation efficiency due to saturation. This effect can lead to identify the lens-to-sample distance that produces the highest fluence on the sample. A strategy to detect the working focus position based on monitoring the intensity of plasma emission was proposed. Variations of laser energy, pulse overlap and material type were also studied. (C) 2013 The Authors. Published by Elsevier B.V. Selection and/or peer-review under responsibility of the German Scientific Laser Society (WLT e.V.)

引用

页码：904 / 911

页数：8

共 8 条

[1] Effect of focus position on informational properties of acoustic emission generated by laser-material interactions [J].

Bordatchev, Evgueni V. ;

Nikumb, Suwas K. .

APPLIED SURFACE SCIENCE, 2006, 253 (03) :1122-1129

[2]

Cremers D., 2006, HDB LASER INDUCED BR, P199

[3] Energy dependence of emission intensity and temperature in a LIBS plasma using femtosecond excitation [J].

Eland, KL ;

Stratis, DN ;

Gold, DM ;

Goode, SR ;

Angel, SM .

APPLIED SPECTROSCOPY, 2001, 55 (03) :286-291

[4] Focus control system for laser welding [J].

Haran, FM ;

Hand, DP ;

Peters, C ;

Jones, JDC .

APPLIED OPTICS, 1997, 36 (21) :5246-5251

[5] Concept and operating performance use based on laser-induced of inspection machines for industrial breakdown spectroscopy [J].

Noll, R ;

Mönch, I ;

Klein, O ;

Lamott, A .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2005, 60 (7-8) :1070-1075

[6] Laser-induced breakdown spectroscopy-From research to industry, new frontiers for process control [J].

Noll, Reinhard ;

Sturm, Volker ;

Aydin, Umit ;

Eilers, Daniel ;

Gehlen, Christoph ;

Hoehne, Manuela ;

Lamott, Andre ;

Makowe, Joachim ;

Vrenegor, Jens .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2008, 63 (10) :1159-1166

[7]

Steen WM, 2010, LASER MATERIAL PROCESSING, 4TH EDITION, P485

[8] Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy [J].

Tong, T ;

Li, JG ;

Longtin, JP .

APPLIED OPTICS, 2004, 43 (09) :1971-1980

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