Flexible PCB-MEMS flow sensor

被引：33
作者：
Petropoulos, Anastasios [1 ]
Pagonis, Dimitris N. [2 ]
Kaltsas, Grigoris [1 ]
机构：
[1] TEI Athens, Dept Elect, Athens, Greece
[2] TEI Athens, Dept Naval Architecture, Athens, Greece
来源：
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 | 2012年 / 47卷
关键词：
Flexible substrate; flow sensor; FABRICATION; TECHNOLOGY; DEVICES;
D O I：
10.1016/j.proeng.2012.09.127
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A flexible gas flow sensor was developed and characterized. The sensor was fabricated on a flexible PCB substrate and is able to quantify flow rate based on the thermal transfer principle. Direct electrical communication to the macroworld is achieved, while the effective thermal isolation enhances sensor performance. Characterization in the range of 1-10 SLPM is presented. (C) 2012 Elsevier Ltd....Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.
引用
收藏
页码：236 / 239
页数：4
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