Highly ordered nanoscale patterns produced by masked ion bombardment of a moving solid surface

被引：8

作者：

Gelfand, Martin P. ^{[1
]}

Bradley, R. Mark ^{[1
]}

机构：

[1] Colorado State Univ, Dept Phys, Ft Collins, CO 80523 USA

来源：

PHYSICAL REVIEW B | 2012年 / 86卷 / 12期

基金：

美国国家科学基金会;

关键词：

KURAMOTO-SIVASHINSKY EQUATION; SPUTTERED SURFACES; MORPHOLOGIES; EROSION; GROWTH;

D O I：

10.1103/PhysRevB.86.121406

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We introduce a fabrication method in which a mask with a long, narrow slit is placed between the source of an ion beam and the surface of a solid moving with constant speed. Numerical simulations reveal the method can generate surface ripples and arrays of nanoholes that are virtually defect free. In contrast, the patterns produced by ion bombardment with a broad, unmasked beam are typically rife with defects.

引用

页数：5

共 23 条

[1] Amorphous solid foam structures on germanium by heavy ion irradiation
Bischoff, L.
Pilz, W.
Schmidt, B.
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2011, 104 (04): : 1153 - 1158
[2] Self-organization of Ge nanopattern under erosion with heavy Bi monomer and cluster ions
Bischoff, L.
Heinig, K. -H.
Schmidt, B.
Facsko, S.
Pilz, W.
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 272 : 198 - 201
[3] Spontaneous Pattern Formation Induced by Ion Bombardment of Binary Compounds
Bradley, R. Mark
Shipman, Patrick D.
[J]. PHYSICAL REVIEW LETTERS, 2010, 105 (14)
[4] THEORY OF RIPPLE TOPOGRAPHY INDUCED BY ION-BOMBARDMENT
BRADLEY, RM
HARPER, JME
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2390 - 2395
[5] Roughening and ripple instabilities on ion-bombarded Si
Carter, G
Vishnyakov, V
[J]. PHYSICAL REVIEW B, 1996, 54 (24): : 17647 - 17653
[6] Hydrodynamic approach to surface pattern formation by ion beams
Castro, Mario
Cuerno, Rodolfo
[J]. APPLIED SURFACE SCIENCE, 2012, 258 (09) : 4171 - 4178
[7] Lateral templating for guided self-organization of sputter morphologies
Cuenat, A
George, HB
Chang, KC
Blakely, JM
Aziz, MJ
[J]. ADVANCED MATERIALS, 2005, 17 (23) : 2845 - +
[8] DYNAMIC SCALING OF ION-SPUTTERED SURFACES
CUERNO, R
BARABASI, AL
[J]. PHYSICAL REVIEW LETTERS, 1995, 74 (23) : 4746 - 4749
[9] On the stabilization of ion sputtered surfaces
Davidovitch, Benny
Aziz, Michael J.
Brenner, Michael P.
[J]. PHYSICAL REVIEW B, 2007, 76 (20)
[10] Formation of ordered nanoscale semiconductor dots by ion sputtering
Facsko, S
Dekorsy, T
Koerdt, C
Trappe, C
Kurz, H
Vogt, A
Hartnagel, HL
[J]. SCIENCE, 1999, 285 (5433) : 1551 - 1553

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