Impacts of Sn precursors on solution-processed amorphous zinc-tin oxide films and their transistors

被引:69
作者
Zhao, Yunlong [1 ]
Dong, Guifang [1 ]
Duan, Lian [1 ]
Qiao, Juan [1 ]
Zhang, Deqiang [1 ]
Wang, Liduo [1 ]
Qiu, Yong [1 ]
机构
[1] Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
HIGH-PERFORMANCE; LOW-TEMPERATURE; SOL-GEL; THIN-FILMS; DOPED ZNO; SEMICONDUCTOR; ZN2SNO4;
D O I
10.1039/c2ra00764a
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In order to study the impacts of precursors on solution-processed metal oxide films and the performance of their field-effect transistors (FETs), zinc acetate dehydrate and four different Sn precursors - tin(II) 2-ethylhexanoate, tin(IV) acetate, tin(II) chloride and tin( IV) isopropoxide - were utilized to prepare zinc-tin oxide (ZTO) thin films by metal-organic decomposition (MOD) and sol-gel processes. Through systematic analysis of these films and devices, it is demonstrated that Sn precursors, with different molecular geometrical configurations and organic ligands, greatly affect the thickness, density, morphology and composition of the ZTO thin films and, hence, the performance of their FETs. It is worth noting that although all of the ZTO thin films are amorphous, the morphologies of the ZTO thin films yielded from Sn(II) precursors, with RMS values below 0.5 nm, are much better than those yielded from Sn(IV) precursors. The ZTO-FET prepared from Zn(CH3COO)(2)center dot 2H(2)O and SnCl2 shows a typical field-effect charge carrier mobility of 1.8 cm(2) V-1 s(-1), with an on/off current ratio of 6 x 10(5). Our research also indicates that tin(II) 2-ethylhexanoate and tin(IV) isopropoxide are promising Sn precursors for the fabrication of transistors.
引用
收藏
页码:5307 / 5313
页数:7
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