Optical properties of polymer-like organic thin films deposited by plasma-enhanced chemical vapor deposition using toluene as the precursor

被引：0
|
作者：
Joo, JR
Quan, YC
Jung, DG [1 ]
Kim, SJ
Kim, SY
机构：
[1] Sungkyunkwan Univ, Dept Phys, Suwon 440746, South Korea
[2] Sungkyunkwan Univ, Inst Basic Sci, Suwon 440746, South Korea
[3] Sungkyunkwan Univ, Dept Vacuum Sci & Engn, Suwon 440746, South Korea
[4] Ajou Univ, Dept Phys, Suwon 442749, South Korea
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1999年 / 38卷 / 4A期
关键词：
polymer-like organic thin film; plasma-enhanced chemical vapor deposition; plasma polymerization; toluene; extinction coefficient; refractive index;
D O I：
10.1143/JJAP.38.2150
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Polymer-like organic thin films (POTFs) were deposited by plasma-enhanced chemical vapor deposition (PECVD) using toluene as the precursor. Refractive indices and extinction coefficients of the POTFs could be varied by changing the plasma power and the deposition temperature, which are easily and continuously controllable deposition parameters.
引用
收藏
页码：2150 / 2151
页数：2
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