Formation of iron and iron silicides on silicon and iron surfaces. Role of the deposition rate and volumetric effects

被引：7

作者：

Gouralnik, A. S. ^{[1
]}

Dotsenko, S. A. ^{[1
,2
]}

Galkin, N. G. ^{[1
,2
]}

Ivanov, V. A. ^{[2
]}

Plotnikov, V. S. ^{[2
]}

Pustovalov, E. V. ^{[2
]}

Cherednichenko, A. I. ^{[2
,3
]}

Gutakovski, A. K. ^{[4
]}

Neklyudova, M. A. ^{[4
]}

机构：

[1] Russian Acad Sci, Far Eastern Branch, Inst Automat & Control Proc, Vladivostok 690041, Russia

[2] Far Eastern Fed Univ, Phys Dpt, Vladivostok 690000, Russia

[3] Russian Acad Sci, Inst Chem, Far Eastern Branch, Vladivostok 690022, Russia

[4] Russian Acad Sci, Siberian Branch, AV Rzhanov Inst Semicond Phys, Novosibirsk 630090, Russia

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2013年 / 112卷 / 02期

关键词：

GROWTH;

D O I：

10.1007/s00339-012-7440-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A thin iron film deposited at the rate of 10(3) nm/sec on the Si(001) surface and a sandwich structure silicon/iron/Si(111) are studied by Surface Magneto-Optic Kerr Effect, High Resolution Electron Microscopy and X-ray Photoelectron Microscopy methods. The phases present in the structures are identified. Both structures are non-uniform. The ultra-fast-deposited film is magnetically hard (H (c)=45 Oe), it contains the silicide Fe5Si3. The XPS line shift by +0.55 eV with respect to the pure iron 2p 3/2 level is attributed to Fe5Si3. The cross-section image of the sandwich structure shows the presence of enhanced-intermixing channels crossing the Si-rich layer. Iron atoms are the main diffusion species both at the Fe/Si(111) and Si/Fe interfaces. The nature of the volume defect and internal stresses in the transforming iron silicides and their effects on material intermixing and film growth process are discussed.

引用

页码：507 / 515

页数：9

共 22 条

[1]

[Anonymous], 1987, CHEST

[2] New developments in the Inorganic Crystal Structure Database (ICSD): accessibility in support of materials research and design [J].

Belsky, A ;

Hellenbrandt, M ;

Karen, VL ;

Luksch, P .

ACTA CRYSTALLOGRAPHICA SECTION B-STRUCTURAL SCIENCE, 2002, 58 :364-369

[3] Self-clustering phenomenon of epitaxial FeSi nanoislands on Si(001) [J].

Chen, Shu-Fang ;

Chung, Hung-Chin ;

Liu, Chuan-Pu .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (01)

[4] Structural stability of Fe5Si3 and Ni2Si studied by high-pressure x-ray diffraction and ab initio total-energy calculations [J].

Errandonea, D. ;

Santamaria-Perez, D. ;

Vegas, A. ;

Nuss, J. ;

Jansen, M. ;

Rodriguez-Hernandez, P. ;

Munoz, A. .

PHYSICAL REVIEW B, 2008, 77 (09)

[5] METALLIZATION-INDUCED SPONTANEOUS SILICIDE FORMATION AT ROOM-TEMPERATURE - THE FE/SI CASE [J].

GALLEGO, JM ;

GARCIA, JM ;

ALVAREZ, J ;

MIRANDA, R .

PHYSICAL REVIEW B, 1992, 46 (20) :13339-13344

[6] Initial stages of iron silicide formation on the Si(100)2 x 1 surface [J].

Gomoyunova, M. V. ;

Malygin, D. E. ;

Pronin, I. I. ;

Voronchikhin, A. S. ;

Vyalikh, D. V. ;

Molodtsov, S. L. .

SURFACE SCIENCE, 2007, 601 (21) :5069-5076

[7] A pulse-type evaporator for ultrafast deposition of thin films in ultrahigh vacuum [J].

Gouralnik, A. S. ;

Galkin, G. ;

Ivanov, V. A. ;

Ivanchenko, M. V. ;

Chusovitin, E. A. .

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2007, 50 (03) :408-410

[8] Growth and magnetic properties of the sandwich structure Fe/magnetic silicide/Si(100) obtained from in situ optic and magneto-optic data [J].

Gouralnik, A. S. ;

Galkin, N. G. ;

Goroshko, D. L. ;

Dotsenko, S. A. ;

Alekseev, A. A. ;

Ivanov, V. A. .

SOLID STATE COMMUNICATIONS, 2009, 149 (31-32) :1292-1295

[9] A simple and effective setup for in situ investigations of the surface magnetooptic Kerr effect in ultrahigh vacuum [J].

Gural'nik, A. S. ;

Galkin, N. G. ;

Goroshko, D. L. ;

Ivanov, V. A. ;

Maslov, A. M. ;

Soppa, I. V. ;

Turchin, T. V. ;

Park, W. ;

Park, Y. .

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2006, 49 (06) :834-838

[10] Iron silicides grown by solid phase epitaxy on a Si(111) surface: Schematic phase diagram [J].

Kataoka, K. ;

Hattori, K. ;

Miyatake, Y. ;

Daimon, H. .

PHYSICAL REVIEW B, 2006, 74 (15)

← 1 2 3 →