Effect of different calcination temperatures and post annealing on the properties of 1,3 propanediol based Sol-Gel (Na0.5K0.5) NbO3 (NKN) thin films

被引：5

作者：

Wiegand, Sebastian ^{[1
]}

Flege, Stefan ^{[1
]}

Baake, Olaf ^{[1
]}

Ensinger, Wolfgang ^{[1
]}

机构：

[1] Tech Univ Darmstadt, Dept Mat & Geosci, Mat Anal Grp, D-64287 Darmstadt, Germany

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2013年 / 548卷

关键词：

Ceramics; Ferroelectrics; Thin film; Sol-Gel processes; Scanning electron microscopy; SEM; X-ray diffraction; CHEMICAL SOLUTION DEPOSITION; LEAD-FREE PIEZOCERAMICS; PIEZOELECTRIC PROPERTIES; CERAMICS; (BI;

D O I：

10.1016/j.jallcom.2012.08.099

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

1,3 Propanediol based Sol-Gel (Na0.5K0.5) NbO3 (NKN) lead-free thin films were synthesized on Pt/Ti/SiO2/Si substrates. Na-acetate, K-acetate, and Nb-pentaethoxide were used as metal precursors and 1,3 propanediol as solvent. The influence of different calcination temperatures on the properties of the NKN thin films was analysed by SEM pictures, XRD, hysteresis and leakage current measurements. Low calcination temperatures led to low leakage currents over the whole electric field range. Based on these findings a calcination at low temperatures was combined with a post annealing step. In this way low leakage currents of 6 x 10(-5) A/cm(2) at an electric field of 150 kV/cm and 2 P-r and 2 E-c values of 26.6 mu C/cm(2) and 214 kV/cm, respectively, could be achieved. All films with post annealing treatment were free of pore and crack formation on the surface and crystallized in the single perovskite phase of NKN. (c) 2012 Elsevier B.V. All rights reserved.

引用

页码：38 / 45

页数：8

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