Work function of indium tin oxide transparent conductor measured by photoelectron spectroscopy

被引:617
作者
Park, Y
Choong, V
Gao, Y
Hsieh, BR
Tang, CW
机构
[1] XEROX CORP,WILSON CTR RES & TECHNOL,WEBSTER,NY 14580
[2] EASTMAN KODAK CO,IMAGING RES & ADV DEV,ROCHESTER,NY 14650
关键词
D O I
10.1063/1.116313
中图分类号
O59 [应用物理学];
学科分类号
摘要
We used ultraviolet and x-ray photoelectron spectroscopy (XPS) and (UPS) techniques to directly measure absolute values of vacuum work function of indium tin oxide (ITO) thin films. We obtained a work function of 4.4-4.5 eV which is lower than the commonly cited value. These values do not change substantially by heating and Ar ion sputtering. The atomic concentrations of each element in ITO, measured with XPS, are also quite stable under heat treatment and ion sputtering. (C) 1996 American Institute of Physics.
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页码:2699 / 2701
页数:3
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