共 18 条
[3]
[Anonymous], SENT DEV US GUID VER
[4]
[Anonymous], J APPL PHYS
[5]
Thermal stability of the Al2O3 passivation on p-type silicon surfaces for solar cell applications
[J].
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS,
2009, 3 (7-8)
:233-235
[8]
Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2007, 25 (05)
:1357-1366
[9]
Photoconductance-calibrated photoluminescence lifetime imaging of crystalline silicon
[J].
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS,
2008, 2 (06)
:245-247