Low power CO2 NDIR sensing using a micro-bolometer detector and a micro-hotplate IR-source

被引：50

作者：

Barritault, Pierre ^{[1
]}

Brun, Mickael ^{[1
]}

Lartigue, Olivier ^{[1
]}

Willemin, Jerome ^{[1
]}

Ouvrier-Buffet, Jean-Louis ^{[1
]}

Pocas, Stephane ^{[1
]}

Nicoletti, Sergio ^{[1
]}

机构：

[1] CEA, LETI, F-38054 Grenoble 9, France

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2013年 / 182卷

关键词：

NDIR; Micro-bolometer; CO2; sensing; Hydrocarbons sensing; Micro-hotplate; ARRAY;

D O I：

10.1016/j.snb.2013.03.048

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper reports the fabrication and the characterisation of a NDIR sensor based on a micro-bolometer detector and a MEMS IR-source. The accuracy and repeatability of the sensor was studied for CO2 and hydrocarbons detection. The results show that the performances obtained are totally compatible with indoor air quality requirements. Moreover the sensor has a very low power consumption (in the order of 1 mJ per measurement), which makes it suitable for autonomous applications. Finally, we emphasise the fact that this sensor, because it uses a bolometer array, can be converted in a multi-gas sensor. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：565 / 570

页数：6