The potential of porous silicon gas sensors

被引：136
|
作者：
Ozdemir, Serdar [1 ]
Gole, James L. [1 ,2 ]
机构：
[1] Georgia Inst Technol, Sch Phys, Atlanta, GA 30332 USA
[2] Georgia Inst Technol, Sch Mech Engn, Atlanta, GA 30332 USA
来源：
CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE | 2007年 / 11卷 / 5-6期
关键词：
Porous silicon; Gas sensor; Nanostructure modification; Photoluminescence;
D O I：
10.1016/j.cossms.2008.06.003
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Recent developments in porous silicon gas sensors have been reviewed. Monitored species detection levels, and the mechanisms of sensing for different sensor designs are also discussed. Porous silicon surface modification methods have been employed for detecting different gas molecules; H2O, ethanol, methanol, isopropanol, COx, NOx, NH3, O-2, H-2, HCl, SO2, H2S and PH3. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码：92 / 100
页数：9
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