The potential of porous silicon gas sensors

被引：136
|
作者：
Ozdemir, Serdar [1 ]
Gole, James L. [1 ,2 ]
机构：
[1] Georgia Inst Technol, Sch Phys, Atlanta, GA 30332 USA
[2] Georgia Inst Technol, Sch Mech Engn, Atlanta, GA 30332 USA
来源：
CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE | 2007年 / 11卷 / 5-6期
关键词：
Porous silicon; Gas sensor; Nanostructure modification; Photoluminescence;
D O I：
10.1016/j.cossms.2008.06.003
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Recent developments in porous silicon gas sensors have been reviewed. Monitored species detection levels, and the mechanisms of sensing for different sensor designs are also discussed. Porous silicon surface modification methods have been employed for detecting different gas molecules; H2O, ethanol, methanol, isopropanol, COx, NOx, NH3, O-2, H-2, HCl, SO2, H2S and PH3. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码：92 / 100
页数：9
相关论文
共 50 条
  • [1] The Potential for Alcohol-containing Gas Sensors Based on DBR Porous Silicon
    Kim, Young-You
    Kim, Han-Jung
    Lee, Ki-Won
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 55 (02) : 415 - 418
  • [2] Noise spectroscopy of porous silicon gas sensors
    Aroutiounian, V. M.
    Mkhitaryan, Z. H.
    Shatveryan, A. A.
    Gasparyan, F. V.
    Ghulinyan, M.
    Pavesi, L.
    Kish, L. B.
    Granqvist, C. G.
    SENSORS, AND COMMAND, CONTROL, COMMUNICATIONS, AND INTELLIGENCE (C3I) TECHNOLOGIES FOR HOMELAND SECURITY AND HOMELAND DEFENSE VII, 2008, 6943
  • [3] Porous Silicon Structures as Optical Gas Sensors
    Levitsky, Igor A.
    SENSORS, 2015, 15 (08) : 19968 - 19991
  • [4] Synthesis and characterization of porous silicon gas sensors
    Abbas, Roaa A.
    Alwan, Alwan M.
    Abdulhamied, Zainab T.
    IBN AL-HAITHAM FIRST INTERNATIONAL SCIENTIFIC CONFERENCE, 2018, 1003
  • [5] Multiparametric gas sensors with porous silicon optical microcavities
    Gaburro, Z
    Faglia, G
    Baratto, C
    Sberveglieri, G
    Pavesi, L
    2001 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOL 1 & 2, PROCEEDINGS, 2001, : 19 - 22
  • [6] Tuning of the Sensitivity of Porous Silicon JFET Gas Sensors
    Barillaro, G.
    Strambini, L. M.
    Lazzerini, G. M.
    OLFACTION AND ELECTRONIC NOSE, PROCEEDINGS, 2009, 1137 : 394 - 397
  • [7] Gas sensors based on silicon devices with a porous layer
    Barillaro, G
    Diligenti, A
    Nannini, A
    Strambini, LM
    Physica Status Solidi C - Conferences and Critical Reviews, Vol 2, No 9, 2005, 2 (09): : 3424 - 3428
  • [8] The role of quantum confinement in porous silicon gas sensors
    Ninno, D
    Buonocore, F
    Cantele, G
    Iadonisi, G
    Di Francia, G
    SENSORS AND MICROSYSTEMS, 2000, : 134 - 138
  • [9] Porous Silicon Gas Sensors: The Role of the Layer Thickness and the Silicon Conductivity
    Ramirez-Gonzalez, Francisco
    Garcia-Salgado, Godofredo
    Rosendo, Enrique
    Diaz, Tomas
    Nieto-Caballero, Fabiola
    Coyopol, Antonio
    Romano, Roman
    Luna, Alberto
    Monfil, Karim
    Gastellou, Erick
    SENSORS, 2020, 20 (17) : 1 - 10
  • [10] Effect of current density on the porous silicon preparation as gas sensors
    Kareem, Muna H.
    Hussein, Adi M. Abdul
    Hussein, Haitham Talib
    JOURNAL OF THE MECHANICAL BEHAVIOR OF MATERIALS, 2021, 30 (01) : 257 - 264
12345