High-temperature fiber-tip pressure sensor

被引：123

作者：

Zhu, YZ ^{[1
]}

Cooper, KL ^{[1
]}

Pickrell, GR ^{[1
]}

Wang, A ^{[1
]}

机构：

[1] Virginia Polytech Inst & State Univ, Bradley Dept Elect & Comp Engn, Ctr Photon Technol, Blacksburg, VA 24061 USA

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2006年 / 24卷 / 02期

关键词：

Fabry-Perot (FP) interferometer; fiber-optic sensor; high temperature; miniature; pressure sensor;

D O I：

10.1109/JLT.2005.862444

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a miniature fiber-optic high-temperature pressure sensor fabricated on the tip of a single-mode (SM) fiber by means of fusion splicing, cleaving, and wet chemical etching. A new approach was developed to simplify the fabrication and greatly improve the sensitivity. The sensor is made entirely of fused silica, whose high-temperature sensing capability is explored in detail for the first time. Two sensors were tested up to 611 degrees C and 710 degrees C, respectively, showing excellent repeatability better than 0.62% and 1.4%. The maximum operating temperature is limited by the mechanical creep of the fused silica diaphragm.

引用

页码：861 / 869

页数：9

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