High-temperature fiber-tip pressure sensor

被引：121

作者：

Zhu, YZ ^{[1
]}

Cooper, KL ^{[1
]}

Pickrell, GR ^{[1
]}

Wang, A ^{[1
]}

机构：

[1] Virginia Polytech Inst & State Univ, Bradley Dept Elect & Comp Engn, Ctr Photon Technol, Blacksburg, VA 24061 USA

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2006年 / 24卷 / 02期

关键词：

Fabry-Perot (FP) interferometer; fiber-optic sensor; high temperature; miniature; pressure sensor;

D O I：

10.1109/JLT.2005.862444

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a miniature fiber-optic high-temperature pressure sensor fabricated on the tip of a single-mode (SM) fiber by means of fusion splicing, cleaving, and wet chemical etching. A new approach was developed to simplify the fabrication and greatly improve the sensitivity. The sensor is made entirely of fused silica, whose high-temperature sensing capability is explored in detail for the first time. Two sensors were tested up to 611 degrees C and 710 degrees C, respectively, showing excellent repeatability better than 0.62% and 1.4%. The maximum operating temperature is limited by the mechanical creep of the fused silica diaphragm.

引用

页码：861 / 869

页数：9

共 13 条

[1] Bergström J, 1998, PROCEEDINGS OF THE XIX IAHR SYMPOSIUM ON HYDRAULIC MACHINERY AND CAVITATION, VOLS 1 AND 2, P245
[2] Cibula E., 2002, Proceedings of IEEE Sensors 2002. First IEEE International Conference on Sensors (Cat. No.02CH37394), P711, DOI 10.1109/ICSENS.2002.1037190
[3] Di Giovanni M., 1982, Flat and corrugated diaphragm design handbook
[4] Wireless micromachined ceramic pressure sensor for high-temperature applications
Fonseca, MA
English, JM
von Arx, M
Allen, MG
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (04) : 337 - 343
[5] FUKUHARA M, 1992, JPN J APPL PHYS, V33, P2890
[6] HOLMES KC, 2001, P MICR SYST C BERK C, P45
[7] Kurtz A.D., 2003, NASA PROP MEAS SENS
[8] Operation of α(GH)-SiC pressure sensor at 500°C
Okojie, RS
Ned, AA
Kurtz, AD
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1998, 66 (1-3) : 200 - 204
[9] REPRODUCIBLE FABRICATION TECHNIQUE OF NANOMETRIC TIP DIAMETER FIBER PROBE FOR PHOTON SCANNING TUNNELING MICROSCOPE
PANGARIBUAN, T
YAMADA, K
JIANG, SD
OHSAWA, H
OHTSU, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (9A): : L1302 - L1304
[10] Micromachined, SiC fiber optic pressure sensors for high-temperature aerospace applications
Pulliam, W
Russler, P
Mlcak, R
Murphy, K
Kozikowski, C
[J]. INDUSTRIAL SENSING SYSTEMS, 2000, 4202 : 21 - 30

← 1 2 →