Sub 60 mV/decade Switch Using an InAs Nanowire-Si Heterojunction and Turn-on Voltage Shift with a Pulsed Doping Technique

被引:62
作者
Tomioka, Katsuhiro [1 ,2 ,3 ]
Yoshimura, Masatoshi [1 ,2 ]
Fukui, Takashi [1 ,2 ]
机构
[1] Hokkaido Univ, Grad Sch Informat Sci & Technol, Sapporo, Hokkaido 0600814, Japan
[2] Hokkaido Univ, RCIQE, Sapporo, Hokkaido 0608628, Japan
[3] Japan Sci & Technol Agcy JST, PRESTO, Kawaguchi, Saitama 3320012, Japan
基金
日本科学技术振兴机构;
关键词
III-V nanowire; selective-area growth; doping; novel transistor; FIELD-EFFECT TRANSISTORS; PERFORMANCE; IMPACT;
D O I
10.1021/nl402447h
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We report changes of turn-on voltage in InAs-Si heterojunction steep subthreshold-slope transistors by the Zn-pulsed doping technique for InAs nanowire channels. The doping of the nanowire channel moderately changes turn-on voltage from negative to positive voltage, while keeping a steep subthreshold-slope of 30 mV/decade under reverse bias direction. The formation of pseudointrinsic InAs segment is found to be important to make a normally off transistor with a steep subthreshold slope.
引用
收藏
页码:5822 / 5826
页数:5
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