Full-Dimensional Surface Characterization Based on Polarized Coherent Coded Aperture Correlation Holography

被引：4

作者：

Xiong, Rui ^{[1
]}

Zhang, Xiangchao ^{[1
,2
]}

Ma, Xinyang ^{[1
,2
]}

Li, Leheng ^{[1
]}

Qi, Lili ^{[1
]}

Wang, Jian ^{[3
]}

Jiang, Xiangqian ^{[1
,4
]}

机构：

[1] Fudan Univ, Shanghai Engn Res Ctr Ultraprecis Opt Mfg, Sch Informat Sci & Technol, Shanghai 200438, Peoples R China

[2] Yiwu Res Inst Fudan Univ, Yiwu 322000, Zhejiang, Peoples R China

[3] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China

[4] Univ Huddersfield, Future Metrol Hub, Huddersfield HD1, England

来源：

IEEE PHOTONICS JOURNAL | 2022年 / 14卷 / 06期

基金：

中国国家自然科学基金;

关键词：

Digital holography; microscopy; reconstruction; surface topography; Stokes vector; DIGITAL HOLOGRAMS; INTERFERENCELESS;

D O I：

10.1109/JPHOT.2022.3222512

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The coded aperture correlation holography (COACH) is a powerful three-dimensional imaging technique. However, the conventional COACH method can only restore the three-dimensional images of the samples under test, but cannot specify the physical characteristics. We propose a full-dimensional measurement method based on the polarized coded aperture correlation holography. Specifically, the dynamic phase and geometric phase distributions can be separated from two holograms associated with the horizontal and vertical polarization components, then the Stokes parameters, surface topography and reflectivity can be calculated simultaneously. This method achieves the same spatial resolution for the two terms, which greatly improves the reliability and practicability with respect to conventional measurement methods.

引用

页数：7

共 28 条

[1] ROTATING-DETECTOR ELLIPSOMETER FOR MEASUREMENT OF THE STATE OF POLARIZATION OF LIGHT [J].

AZZAM, RMA .

OPTICS LETTERS, 1985, 10 (09) :427-429

[2] MEASUREMENT OF STOKES PARAMETERS OF LIGHT [J].

BERRY, HG ;

GABRIELSE, G ;

LIVINGSTON, AE .

APPLIED OPTICS, 1977, 16 (12) :3200-3205

[3]

BOSSELMANN T, 1984, P SOC PHOTO-OPT INST, V514, P361, DOI 10.1117/12.945113

[4] Advances in engineered surfaces for functional performance [J].

Bruzzone, A. A. G. ;

Costa, H. L. ;

Lonardo, P. M. ;

Lucca, D. A. .

CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2008, 57 (02) :750-769

[5] Subsampled scanning holographic imaging (SuSHI) for fast, non-adaptive recording of three-dimensional objects [J].

Chan, Antony C. S. ;

Tsia, Kevin K. ;

Lam, Edmund Y. .

OPTICA, 2016, 3 (08) :911-917

[6] Comparison of optical surface roughness measured by stylus profiler, AFM and white light interferometer using power spectral density [J].

Chen Jianchao ;

Sun Tao ;

Wang Jinghe .

5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, 2010, 7656

[7] Polarization-Sensitive Digital Holographic Imaging for Characterization of Microscopic Samples: Recent Advances and Perspectives [J].