Superconducting nanowire single photon detector on diamond

被引:35
作者
Atikian, Haig A. [1 ]
Eftekharian, Amin [2 ,3 ]
Salim, A. Jafari [2 ,3 ]
Burek, Michael J. [1 ]
Choy, Jennifer T. [1 ]
Majedi, A. Hamed [2 ,3 ]
Loncar, Marko [1 ]
机构
[1] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA
[2] Univ Waterloo, Waterloo, ON N2L 3G1, Canada
[3] Univ Waterloo, Inst Quantum Comp, Waterloo, ON N2L 3G1, Canada
基金
加拿大自然科学与工程研究理事会; 美国国家科学基金会;
关键词
ENTANGLEMENT;
D O I
10.1063/1.4869574
中图分类号
O59 [应用物理学];
学科分类号
摘要
Superconducting nanowire single photon detectors are fabricated directly on diamond substrates and their optical and electrical properties are characterized. Dark count performance and photon count rates are measured at varying temperatures for 1310 nm and 632 nm photons. A multi-step diamond surface polishing procedure is reported, involving iterative reactive ion etching and mechanical polishing to create a suitable diamond surface for the deposition and patterning of thin film superconducting layers. Using this approach, diamond substrates with less than 300 pm Root Mean Square surface roughness are obtained. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:4
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