ELECTRIC AND OPTICAL PROPERTIES OF In2-x-ySnxZnyO3-δ THIN FILMS

被引：0
|
作者：
Iacomi, F. [1 ]
Lazar, A. [1 ]
Frunza, R. [1 ]
Rotaru, R. [1 ]
Carlescu, A. [1 ]
Sandu, I. [2 ]
Purica, M. [3 ]
Gavrila, R. [3 ]
机构：
[1] Alexandru Ioan Cuza Univ, Fac Phys, 11 Carol I Blvd, Iasi 700506, Romania
[2] AI I Cuza Univ, Interdisciplinary Lab Scientif Investigat, Iasi, Romania
[3] Natl Inst R & D Microtechnol, Bucharest, Romania
来源：
2011 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS 2011), 34TH EDITION, VOLS 1 AND 2 | 2011年
关键词：
n-type TCO; p-type TCO; structure; optical properties; electrical properties;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Some p-type and n-type ZITO transparent and conductive films of 300 nm thickness, have been deposited by vacuum thermal evaporation and oxidation in air on different substrates. The electrical and optical properties of the thin films have been studied as a function of chemical composition, substrate nature and annealing conditions. X-ray diffraction and scanning electron microscopy were used in order to investigate thin film structures. The electrical conductivity and transmittance of n-type thin films are higher than electrical conductivity and transmittance of p-type thin films.
引用
收藏
页码：283 / 286
页数：4
相关论文
共 50 条
  • [1] Electrical and optical properties of GexFexSe100-2x chalcogenide thin films
    Mahmoud, EA
    El-Samanoudy, MM
    Abd Rabo, AS
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2002, 63 (11) : 2003 - 2010
  • [2] Optical Properties of In2S3 Thin Films
    Bodnar, I. V.
    Polubok, V. A.
    JOURNAL OF APPLIED SPECTROSCOPY, 2014, 81 (05) : 881 - 884
  • [3] Optical Properties of In2S3 Thin Films
    I. V. Bodnar
    V. A. Polubok
    Journal of Applied Spectroscopy, 2014, 81 : 881 - 884
  • [4] Structural, electrical and optical properties of Bi2Se3 and Bi2Se(3-x)Tex thin films
    Augustine, S
    Ampili, S
    Kang, JK
    Mathai, E
    MATERIALS RESEARCH BULLETIN, 2005, 40 (08) : 1314 - 1325
  • [5] Optical, structural, and electrical properties of Cu2O thin films
    Akkari, Ferid Chaffar
    Kanzari, Mounir
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2010, 207 (07): : 1647 - 1651
  • [6] Optical properties of thermally evaporated Bi2Te3 thin films
    Dheepa, J
    Sathyamoorthy, R
    Subbarayan, A
    JOURNAL OF CRYSTAL GROWTH, 2005, 274 (1-2) : 100 - 105
  • [7] Electrical and optical properties of WO3 thin films
    Regragui, M
    Jousseaume, V
    Addou, M
    Outzourhit, A
    Bernéde, JC
    El Idrissi, B
    THIN SOLID FILMS, 2001, 397 (1-2) : 238 - 243
  • [8] Optical and photoelectric properties of Gex(As2Te3)100-x thin films
    Elshafie, A
    Mansour, BA
    Abdel-All, A
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1999, 60 (04) : 483 - 491
  • [9] Nonlinear optical properties of As2Se3 thin films
    Kim, SY
    Kang, MJ
    Choi, SY
    THIN SOLID FILMS, 2005, 493 (1-2) : 207 - 211
  • [10] Effect of Al, Ga, and In Doping on the Optical, Structural, and Electric Properties of ZnO Thin Films
    Porcar, Samuel
    Gonzalez, Jaime
    Fraga, Diego
    Stoyanova Lyubenova, Teodora
    Soraca, Gina
    Carda, Juan B.
    APPLIED SCIENCES-BASEL, 2021, 11 (21):
12345