共 85 条
[21]
MEASUREMENT OF CORNEAL THICKNESS BY LOW-COHERENCE INTERFEROMETRY
[J].
APPLIED OPTICS,
1992, 31 (31)
:6637-6642
[22]
Spectral interferometry and reflectometry used to measure thin films
[J].
APPLIED PHYSICS B-LASERS AND OPTICS,
2008, 92 (02)
:203-207
[26]
JIN J, 2016, MEAS SCI TECHNOL, V27, P22001
[27]
Fizeau-type interferometric probe to measure geometrical thickness of silicon wafers
[J].
OPTICS EXPRESS,
2014, 22 (19)
:23427-23432
[28]
Thickness and refractive index measurement of a silicon wafer based on an optical comb
[J].
OPTICS EXPRESS,
2010, 18 (17)
:18339-18346