Highly conductive lines by plasma-induced conversion of inkjet-printed silver nitrate traces

被引:32
作者
Bromberg, Vadim [1 ]
Ma, Siyuan [1 ]
Egitto, Frank D. [2 ]
Singler, Timothy J. [1 ]
机构
[1] SUNY Binghamton, Dept Mech Engn, Binghamton, NY 13902 USA
[2] Endicott Interconnect Technol, Res & Dev, Endicott, NY 13760 USA
关键词
PLATINUM NANOPARTICLES; METAL NANOPARTICLES; REDUCTION; SURFACES; INKS; FABRICATION; RESOLUTION; STABILITY; PATTERNS; LIQUID;
D O I
10.1039/c3tc31361a
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report a rapid process of argon plasma conversion of inkjet printed lines of silver nitrate to yield final electrical resistivities comparable to that of bulk silver. The plasma processing produces a layer of silver with electrical and thickness properties dependent on plasma power and process time. Final line morphology is shown to be determined by the evaporatively driven process of silver nitrate crystallization during printing. This technique holds significant potential for rapid and low-cost additive fabrication of metallization patterns for electronic circuits.
引用
收藏
页码:6842 / 6849
页数:8
相关论文
共 50 条
[1]  
Beckert E., 2012, J MATER CHEM, V22, P24569
[2]   Inkjet deposited circuit components [J].
Bidoki, S. M. ;
Nouri, J. ;
Heidari, A. A. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (05)
[3]   A novel electrostatic probe method for ion flux measurements [J].
Braithwaite, NS ;
Booth, JP ;
Cunge, G .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (04) :677-684
[4]   Application of Silver Nitrate Solution and Inkjet Printing in the Fabrication of Microstructural Patterns on Glass Substrates [J].
Chang, Hung-Ju ;
Tsai, Ming-Hsiu ;
Hwang, Weng-Sing ;
Wu, Jung-Tang ;
Hsu, Steve Lien-Chung ;
Chou, Hsin-Hung .
JOURNAL OF PHYSICAL CHEMISTRY C, 2012, 116 (07) :4612-4620
[5]   Cold Plasma Metallization of Supported Metal Salt Layers [J].
Crowther, J. M. ;
Badyal, J. P. S. .
AUSTRALIAN JOURNAL OF CHEMISTRY, 2012, 65 (08) :1139-1144
[6]  
Crowther JM, 1998, ADV MATER, V10, P407, DOI 10.1002/(SICI)1521-4095(199803)10:5<407::AID-ADMA407>3.3.CO
[7]  
2-X
[8]   Dry plasma reduction to synthesize supported platinum nanoparticles for flexible dye-sensitized solar cells [J].
Dao, Van-Duong ;
Chinh Quoc Tran ;
Ko, Seung-Hyeon ;
Choi, Ho-Suk .
JOURNAL OF MATERIALS CHEMISTRY A, 2013, 1 (14) :4436-4443
[9]   Capillary flow as the cause of ring stains from dried liquid drops [J].
Deegan, RD ;
Bakajin, O ;
Dupont, TF ;
Huber, G ;
Nagel, SR ;
Witten, TA .
NATURE, 1997, 389 (6653) :827-829
[10]   Inkjet Printing of Functional and Structural Materials: Fluid Property Requirements, Feature Stability, and Resolution [J].
Derby, Brian .
ANNUAL REVIEW OF MATERIALS RESEARCH, VOL 40, 2010, 40 :395-414