Monolithically integrated interferometer for optical displacement measurement

被引:0
|
作者
Hofstetter, D [1 ]
Zappe, HP [1 ]
机构
[1] PAUL SCHERRER INST,CH-8048 ZURICH,SWITZERLAND
来源
关键词
optoelectronic integration; III-V-based optical sensors; displacement measurement chip; distributed Bragg reflector laser; vacancy-enhanced disordering;
D O I
10.1117/12.229969
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:380 / 391
页数:12
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