Ohmic contacts to n-type GaSb grown on GaAs by the Interfacial Misfit Dislocation technique

被引:7
作者
Rahimi, N. [1 ]
Aragon, A. A. [1 ]
Romero, O. S. [1 ]
Kim, D. M.
Traynor, N. B. J.
Rotter, T. J. [1 ]
Balakrishnan, G. [1 ]
Mukherjee, S. D. [1 ]
Lester, L. F. [1 ]
机构
[1] Univ New Mexico, Ctr High Technol Mat, Albuquerque, NM 87106 USA
来源
PHYSICS, SIMULATION, AND PHOTONIC ENGINEERING OF PHOTOVOLTAIC DEVICES II | 2013年 / 8620卷
关键词
Ohmic contacts; GaSb; GaAs; Interfacial Misfit Dislocation; TLM pattern; Specific contact resistance; MOLECULAR-BEAM EPITAXY; GALLIUM ANTIMONIDE; LASERS;
D O I
10.1117/12.2003392
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Low resistance ohmic contacts have been successfully fabricated on n-GaSb layers grown by MBE on semi-insulating (SI) GaAs substrates using the Interfacial Misfit Dislocation (IMF) technique. Although intended for photovoltaic applications, the results are applicable to many antimonide-based devices. The IMF technique enables the growth of epitaxial GaSb layers on semi-insulating GaAs substrates resulting in vertical current confinement not possible on unintentionally doped similar to 1e17 cm(-3) p-doped bulk GaSb. Results for low resistance ohmic contacts using NiGeAu, PdGeAu, GeAuNi and GeAuPd metallizations for various temperatures are reported. Specific transfer resistances down to 0.12 Omega-mm and specific contact resistances of < 2e-6 Omega-cm(2) have been observed.
引用
收藏
页数:12
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