Enhanced infra-red emission from sub-millimeter microelectromechanical systems micro hotplates via inkjet deposited carbon nanoparticles and fullerenes

被引：22

作者：

De Luca, A. ^{[1
]}

Cole, M. T. ^{[1
,2
]}

Fasoli, A. ^{[1
]}

Ali, S. Z. ^{[2
]}

Udrea, F. ^{[1
,2
]}

Milne, W. I. ^{[1
]}

机构：

[1] Univ Cambridge, Elect Engn Div, Dept Engn, Cambridge CB3 0FA, England

[2] Cambridge CMOS Sensors, Cambridge CB2 3BZ, England

来源：

JOURNAL OF APPLIED PHYSICS | 2013年 / 113卷 / 21期

基金：

英国工程与自然科学研究理事会;

关键词：

THERMAL EMISSION; ABSORPTION; ABSORBER;

D O I：

10.1063/1.4809546

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper, we demonstrate a micro-inkjet printing technique as a reproducible post-process for the deposition of carbon nanoparticles and fullerene adlayers onto fully CMOS compatible micro-electro-mechanical silicon-on-insulator infrared (IR) light sources to enhance their infrared emission. We show experimentally a significant increase in the infrared emission efficiency of the coated emitters. We numerically validate these findings with models suggesting a dominant performance increase for wavelengths < 5.5 mu m. Here, the bimodal size distribution in the diameter of the carbon nanoparticles, relative to the fullerenes, is an effective mediator towards topologically enhanced emittance of our miniaturised emitters. A 90% improvement in IR emission power density has been shown which we have rationalised with an increase in the mean thickness of the deposited carbon nanoparticle adlayer. (C) 2013 AIP Publishing LLC.

引用

页数：6

共 39 条

[1] Tungsten-Based SOI Microhotplates for Smart Gas Sensors [J].