Understanding interface properties in 2D heterostructure FETs

被引:12
|
作者
Nagashio, Kosuke [1 ]
机构
[1] Univ Tokyo, Dept Mat Engn, Tokyo 1138656, Japan
关键词
graphene; two-dimensional materials; field effect transistor; capacitance measurement; subthreshold swing; FIELD-EFFECT TRANSISTOR; BILAYER GRAPHENE; MOS2; TRANSISTORS; MONOLAYER MOS2; SOI MOSFETS; BANDGAP; STATES; CAPACITANCE; DISORDER; DEFECTS;
D O I
10.1088/1361-6641/aba287
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Fifteen years have passed since graphene was first isolated on the substrate from bulk graphite. During that period, two-dimensional (2D) layered materials with intrinsic band gaps have been realized. Although many exciting results have been reported for both their fundamental physics and applications, the discussion of 2D electron device application to the future integrated circuit is still based on the expectation of the inherently high properties that 2D materials ideally possess. This review article focuses on the gate stack property, which is one of most important building blocks in the field effect transistor. Starting from the comparison of the 2D/SiO(2)interface properties with the conventional SiO2/Si interface properties, recent advances in the studies of gate stack properties for bilayer graphene and MoS(2)field-effect transistors are discussed. In particular, the advantages and disadvantages of the 2D heterostructures with 2D insulator ofh-BN are emphasized. This review may provide conceptual and experimental approaches for controlling the 2D heterointerface properties.
引用
收藏
页数:14
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