On-chip silicon Mach-Zehnder interferometer sensor for ultrasound detection

被引：34

作者：

Ouyang, Boling ^{[1
]}

Li, Yanlu ^{[2
,3
]}

Kruidhof, Marten ^{[1
]}

Horsten, Roland ^{[1
]}

van Dongen, Koen W. A. ^{[1
]}

Caro, Jacob ^{[1
]}

机构：

[1] Delft Univ Technol, Dept Imaging Phys, Lorentzweg 1, NL-2628 CJ Delft, Netherlands

[2] Univ Ghent, IMEC, Photon Res Grp, Technol Pk Zwijnaarde 126, B-9052 Ghent, Belgium

[3] Univ Ghent, Ctr Nano & Biophoton, Technol Pk Zwijnaarde 126, B-9052 Ghent, Belgium

来源：

OPTICS LETTERS | 2019年 / 44卷 / 08期

关键词：

RING-RESONATOR;

D O I：

10.1364/OL.44.001928

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A highly sensitive ultrasound sensor based on an integrated photonics Mach-Zehnder interferometer (MZI) fabricated in silicon-on-insulator technology is reported. The sensing spiral is located on a membrane of size 121 mu m x 121 mu m. Ultrasound waves excite the membrane's vibrational mode, which translates to modulation of the MZI transmission. The measured sensor transfer function is centered at 0.47 MHz and has a -6 dBbandwidth of 21.2%. The sensor sensitivity is linear in the optical input power and reaches a maximum 0.62 mV/Pa, which is limited by the interrogation method. At 0.47 MHz and for an optical power of 1.0 mW the detection limit is 0.38 mPa/Hz(1/2) and the dynamic range is 59 dB. The MZI's gradual transmission function allows a wide range of wavelength operation points. This strongly facilitates sensor use and is promising for applications. (C) 2019 Optical Society of America

引用

页码：1928 / 1931

页数：4

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