Fabrication of nano channel systems in quartz by laser-induced splitting

被引：1

作者：

Qin, JSJ ^{[1
]}

Wen, JL ^{[1
]}

机构：

[1] Chinese Univ Hong Kong, Ctr Micro & Nano Syst, Hong Kong, Hong Kong, Peoples R China

来源：

PROCEEDINGS OF THE 2001 1ST IEEE CONFERENCE ON NANOTECHNOLOGY | 2001年

关键词：

D O I：

10.1109/NANO.2001.966425

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser has been used to dry fabricate micro channels (25 mum-100mum diameter) in a 1 cm(3) fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, a 1D-controllable self-connecting nano fracture can be formed as a rectangular channel. This nano channel is smooth with extremely high aspect ratio (similar to 10(4) depth to width ratio). The length is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast, and inexpensive with potential applications in capillary electrophoresis, and electro-osmosis driven nano-filtration.

引用

页码：233 / 237

页数：5