Limited in incorporation during pseudomorphic InAs/GaAs growth and quantum dot formation observed by in situ stress measurements

被引:8
作者
Silveira, JP [1 ]
García, JM [1 ]
Briones, F [1 ]
机构
[1] CSIC, CNM, Inst Microelect, Tres Cantos 28760, Madrid, Spain
关键词
stress; InAs; GaAs; molecular beam epitaxy; quantum dot; segregation;
D O I
10.1016/S0169-4332(01)00706-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In segregation during InAs growth on (001)GaAs is studied by in situ stress measurements. From the accumulated stress evolution during deposition of I ML of In and the ulterior GaAs overgrowth, a limited In incorporation is observed (similar to50%). The rest of In is floating or physisorbed on the surface, without contributing-to stress through the formation of stable chemical bonds. During overgrowth with GaAs, the In is progressively incorporated as a graded InGaAs layer until total depletion of the floating In layer. This process, very different from Ga/In exchange at the growth front, is strongly temperature dependent for T-g > 400degreesC. The limited In incorporation gives a new perspective on the self-assembling of quantum dot as the low value for the critical thickness (<1 ML InAs) as well as their formation process. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:75 / 79
页数:5
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