AlGaInAsPSb-based high-speed short-cavity VCSEL with single-mode emission at 1.3 μm grown by MOVPE on InP substrate

被引:8
作者
Grasse, Christian [1 ]
Mueller, Michael [1 ]
Gruendl, Tobias [1 ]
Boehm, Gerhard [1 ]
Roenneberg, Enno [2 ]
Wiecha, Peter [1 ]
Rosskopf, Juergen [2 ]
Ortsiefer, Markus [2 ]
Meyer, Ralf [1 ]
Amann, Markus-Christian [1 ]
机构
[1] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany
[2] Vertilas GmbH, Gate Garching, D-85748 Garching, Germany
关键词
Metalorganic vapor phase epitaxy; Antimonides; Phosphides; Semiconducting III-V materials; Laser diodes; SURFACE-EMITTING LASERS; WAVELENGTH; SEMICONDUCTORS; PARAMETERS;
D O I
10.1016/j.jcrysgro.2012.06.051
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this paper we present the first InP-based short-cavity Vertical-Cavity Surface-Emitting Laser with an AlGaInAsP/GaInAsP active region and a re-grown and structured GaAs0.51Sb:C/Ga0.47InAs:Si buried tunnel junction (BTJ), which serves as current aperture, grown by LP-MOVPE. We achieved over 1 mW single-mode continuous-wave (cw) emission at around 1.3 mu m wavelength and room-temperature. The small-signal modulation bandwidth exceeds 7.5 GHz, which is appropriate for 10 Gb/s data transmission, and the series resistance is as low as 24 Omega. The latter value indicates around three times lower dissipated power consumption than comparable MOVPE grown InP-based VCSELs. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:217 / 220
页数:4
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