[1] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA
[2] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA
[3] Harvard Univ, Kavli Inst Bionano Sci & Technol, Cambridge, MA 02138 USA
[4] Univ Saarland, Dept Biopharmaceut & Pharmaceut Technol, D-66119 Saarbrucken, Germany
[5] Helmholtz Inst Pharmaceut Sci Saarland, Saarbrucken, Germany
[6] Korea Inst Sci & Technol, Ctr BioMicrosyst, Seoul, South Korea
[7] Southeast Univ, State Key Lab Bioelect, Seoul 210096, South Korea
[8] Habsel Inc, Cambridge, MA 02142 USA