Nanostructured films of iron, tin and titanium oxides by chemical vapor deposition

被引：79

作者：

Mathur, S ^{[1
]}

Sivakov, V ^{[1
]}

Shen, H ^{[1
]}

Barth, S ^{[1
]}

Cavelius, C ^{[1
]}

Nilsson, A ^{[1
]}

Kuhn, P ^{[1
]}

机构：

[1] Leibniz Inst Neue Mat, CVD Div, D-66041 Saarbrucken, Germany

来源：

THIN SOLID FILMS | 2006年 / 502卷 / 1-2期

关键词：

molecular precursor; chemical vapor deposition; functional oxide coatings;

D O I：

10.1016/j.tsf.2005.07.249

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanostructured films of iron, tin and titanium oxides were grown on glass and quartz by gas phase decomposition of [Fe(O'Bu)(3)](2), [Sn(O'Bu)(4)] and [Ti(O'Pr)(4)], respectively. Films obtained exhibit good adhesion and homogeneous morphology with structural features in the nanometer range. The influence of microstructure and phase on optical (alpha-Fe2O3 and Fe3O4), gas sensing (SnO2) and photocatalytic (TiO2) properties was systematically studied to explore the potential of these coatings for technological applications. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：88 / 93

页数：6

共 33 条

[1]

Bradley D. C., 2001, ALKOXO ARYLOXO DERIV

[2] THE STRUCTURES OF MONO AND BIS BETA-DIKETONATE TIN(IV) ALKOXIDE COMPLEXES [J].

CHANDLER, CD ;

FALLON, GD ;

KOPLICK, AJ ;

WEST, BO .

AUSTRALIAN JOURNAL OF CHEMISTRY, 1987, 40 (08) :1427-1439

[3] Properties of tin oxide films prepared by MOCVD [J].

Choi, GP ;

Park, YJ ;

Noh, WS ;

Park, JS .

DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2, 2004, 449-4 :997-1000

[4]

CHOW GM, 2000, NATO ASI SERIES, V78

[5] Novel nanostructures of functional oxides synthesized by thermal evaporation [J].

Dai, ZR ;

Pan, ZW ;

Wang, ZL .

ADVANCED FUNCTIONAL MATERIALS, 2003, 13 (01) :9-24

[6] Pulsed laser deposition of nanostructured tin oxide films for gas sensing applications [J].

El Khakani, MA ;

Dolbec, R ;

Serventi, AM ;

Horrillo, MC ;

Trudeau, M ;

Saint-Jacques, RG ;

Rickerby, DG ;

Sayago, I .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :383-388

[7] Effect of freon flow rate on tin oxide thin films deposited by chemical vapor deposition [J].

Fang, TH ;

Chang, WJ .

APPLIED SURFACE SCIENCE, 2003, 220 (1-4) :175-180

[8]

Fendler J. H., 1998, NANOPARTICLES NANOST

[9] IRON-OXIDE FILMS WITH SPINEL, CORUNDUM AND BIXBITE STRUCTURE PREPARED BY PLASMA-ENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].

FUJII, E ;

TORII, H ;

TOMOZAWA, A ;

TAKAYAMA, R ;

HIRAO, T .

JOURNAL OF CRYSTAL GROWTH, 1995, 151 (1-2) :134-139

[10] Analysis of thickness dependence of the sensitivity in thin film resistive gas sensors [J].

Hossein-Babaei, F ;

Orvatinia, M .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 89 (03) :256-261

← 1 2 3 4 →