Closed-loop laser polishing using in-process surface finish metrology

被引：8
|
作者：
Faehnle, Oliver [1 ]
Rascher, Rolf [2 ]
Vogt, Christian [2 ]
Kim, Dae Wook [3 ]
机构：
[1] FISBA AG, Rorschacher 268, CH-9016 St Gallen, Switzerland
[2] THD Tech Hsch Deggendorf, Deggendorf, Germany
[3] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA
来源：
APPLIED OPTICS | 2018年 / 57卷 / 04期
关键词：
D O I：
10.1364/AO.57.000834
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method for monitoring an inclusive microsurface quality (e.g., comprising surface roughness and scratch-and-dig) within the polishing spot is analyzed, and its applicability to closed-loop polishing for classical loose-abrasive full-aperture polishing as well as for computer-controlled laser polishing is experimentally tested and verified. This enables the determination of the optimum local dwell time resulting in stable and cost-optimized polishing. (C) 2018 Optical Society of America
引用
收藏
页码：834 / 838
页数：5
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