Interface heterogeneity of periodic multilayer mirrors investigated by X-ray fluorescence, scattering spectroscopy, and mathematical methods of statistics

被引：3

作者：

Mazuritskiy, Mikhail, I ^{[1
]}

Kozakov, Alexey T. ^{[2
]}

Kumar, Niranjan ^{[3
]}

Smertin, Ruslan M. ^{[3
]}

Garakhin, Sergei A. ^{[3
]}

Polkovnikov, Vladimir N. ^{[3
]}

Chkhalo, Nikolay, I ^{[3
]}

机构：

[1] Southern Fed Univ, Fac Phys, Sorge Str 5, Rostov Na Donu 344090, Russia

[2] Southern Fed Univ, Res Inst Phys, 194 Stachki Ave, Rostov Na Donu 344090, Russia

[3] RAS, Inst Phys Microstruct, Afonino 603087, Nizhny Novgorod, Russia

来源：

SURFACES AND INTERFACES | 2022年 / 33卷

关键词：

Multilayer X-ray mirrors; X-ray optics; Micro -X-ray fluorescent analysis; X-ray photoelectron spectroscopy; Degree of surface homogeneity; OPTICS; INTERFERENCE; FABRICATION; REFLECTION;

D O I：

10.1016/j.surfin.2022.102258

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Multilayer interference structures (X-ray mirrors) based on the alternating layers of Mo/Si and W/Si were investigated using laboratory X-ray micro-fluorescence analysis (micro-XFA) and statistical analysis. The physics of interaction processes of primary X-ray radiation scattered on the surface of multilayer periodic structures have been studied. Using the X-ray spectroscopy together with the mathematical methods of statistics made it possible to evaluate a degree of homogeneity and to compare the chemical compositions of different samples of the multilayer mirrors. A correlation between the statistical characteristics of bimodal frequency distribution and the reflectivity properties of X-ray mirrors for the scattered radiation has been revealed. The frequency distributions of mathematical statistics for experimentally collected intensities of the scattered Rh K alpha radiation indicate the depth heterogeneity of the studied samples. Used in this work approach gives a new strategy for testing to improve of efficiency of X-ray mirrors based on the multilayer nanoscale structures.

引用

页数：10

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