THE XECL-EXCILAMP ON THE BASIS OF INDUCTIVE HIGH-FREQUENCY DISCHARGE

被引:0
|
作者
Anufrik, S. S. [1 ]
Shkleinik, V. O. [1 ]
Volodenkov, A. P. [1 ]
Znosko, K. F. [1 ]
机构
[1] Yanka Kupala State Univ Grodno, Grodno 230023, BELARUS
关键词
XeCl-excilamps; power of emission; energy deposition; inductive high-frequency discharge;
D O I
10.1109/CAOL.2008.4671856
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The results of experimental research of noble gas halide excilamp, using inductive high-frequency discharge, are presented. Advantage of this excilamp consists in simplicity of its design. As a source of excitation the power supply unit of own construction was used at pulse repetition frequency 10,5 MHz. Average power of energy deposition in the active medium changed from 40 up to 160 W. At an optimum mode of excitation and composition of active medium (HCl:Xe:He=1:20:20 and total pressure 2 Torr) output power of radiation similar to 10 W has been received at efficiency similar to 10%.
引用
收藏
页码:456 / 458
页数:3
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