Diameter-Dependent Electron Mobility of InAs Nanowires

被引:354
作者
Ford, Alexandra C. [1 ,2 ,3 ]
Ho, Johnny C. [1 ,2 ,3 ]
Chueh, Yu-Lun [1 ,2 ,3 ]
Tseng, Yu-Chih [1 ]
Fan, Zhiyong [1 ,2 ,3 ]
Guo, Jing [4 ]
Bokor, Jeffrey [1 ,2 ]
Javey, Ali [1 ,2 ,3 ]
机构
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[2] Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
[3] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
[4] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
关键词
FIELD-EFFECT TRANSISTORS; SILICON NANOWIRES; CARBON NANOTUBES; HETEROSTRUCTURES; ARRAYS; DIELECTRICS; CAPACITANCE; DEVICES; SCALE;
D O I
10.1021/nl803154m
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Temperature-dependent I-V and C-V spectroscopy of single InAs nanowire field-effect transistors were utilized to directly shed light on the intrinsic electron transport properties as a function of nanowire radius. From C-V characterizations, the densities of thermally activated fixed charges and trap states on the surface of untreated (i.e., without any surface functionalization) nanowires are investigated while enabling the accurate measurement of the gate oxide capacitance, therefore leading to the direct assessment of the field-effect mobility for electrons. The field-effect mobility is found to monotonically decrease as the radius is reduced to <10 nm, with the low temperature transport data clearly highlighting the drastic impact of the surface roughness scattering on the mobility degradation for miniaturized nanowires. More generally, the approach presented here may serve as a versatile and powerful platform for in-depth characterization of nanoscale, electronic materials.
引用
收藏
页码:360 / 365
页数:6
相关论文
共 33 条
[1]  
Arora N., 2006, MOSFET Modeling for VLSI Simulation
[2]   Scanned probe imaging of quantum dots inside InAs nanowires [J].
Bleszynski, Ania C. ;
Zwanenburg, Floris A. ;
Westervelt, R. M. ;
Roest, Aarnoud L. ;
Bakkers, Erik P. A. M. ;
Kouwenhoven, Leo P. .
NANO LETTERS, 2007, 7 (09) :2559-2562
[3]   Vertical high-mobility wrap-gated InAs nanowire transistor [J].
Bryllert, T ;
Wernersson, LE ;
Fröberg, LE ;
Samuelson, L .
IEEE ELECTRON DEVICE LETTERS, 2006, 27 (05) :323-325
[4]  
Bryllert T., 2005, DRC Proc, V1, P157
[5]  
Chen J, 2008, S VLSI TECHN, P32
[6]   Formation and Characterization of NixInAs/InAs Nanowire Heterostructures by Solid Source Reaction [J].
Chueh, Yu-Lun ;
Ford, Alexandra C. ;
Ho, Johnny C. ;
Jacobson, Zachery A. ;
Fan, Zhiyong ;
Chen, Chih-Yen ;
Chou, Li-Jen ;
Javey, Ali .
NANO LETTERS, 2008, 8 (12) :4528-4533
[7]  
DAYEH S, 2007, APPL PHYS LETT, V90
[8]   Indium phosphide nanowires as building blocks for nanoscale electronic and optoelectronic devices [J].
Duan, XF ;
Huang, Y ;
Cui, Y ;
Wang, JF ;
Lieber, CM .
NATURE, 2001, 409 (6816) :66-69
[9]   Large-scale, heterogeneous integration of nanowire arrays for image sensor circuitry [J].
Fan, Zhiyong ;
Ho, Johnny C. ;
Jacobson, Zachery A. ;
Razavi, Haleh ;
Javey, Ali .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2008, 105 (32) :11066-11070
[10]   Wafer-scale assembly of highly ordered semiconductor nanowire arrays by contact printing [J].
Fan, Zhiyong ;
Ho, Johnny C. ;
Jacobson, Zachery A. ;
Yerushalmi, Roie ;
Alley, Robert L. ;
Razavi, Haleh ;
Javey, Ali .
NANO LETTERS, 2008, 8 (01) :20-25