Directed self-assembly of block copolymers for high resolution lithographic applications: From materials design to pattern transfer

被引：0
|
作者：
Hadziioannou, Georges [1 ]
机构：
[1] Univ Bordeaux, LCPO, Leognan, France
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2015年 / 250卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
36
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页数：1
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