Surface-modified silicon nano-channel for urea sensing

被引：33

作者：

Chen, Yu ^{[1
]}

Wang, Xihua ^{[1
]}

Hong, Mi ^{[1
]}

Erramilli, Shyamsunder ^{[1
]}

Mohanty, Pritiraj ^{[1
]}

机构：

[1] Boston Univ, Dept Phys, Boston, MA 02215 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 133卷 / 02期

基金：

美国国家科学基金会;

关键词：

nano-channel; urea; biosensor; lithography;

D O I：

10.1016/j.snb.2008.03.033

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Silicon nano-channels have been surface functionalized with the enzyme urease for biosensor applications to detect and quantify urea concentration. The device is nanofabricated from a silicon-on-insulator (SOI) wafer with a top down lithography approach. The differential conductance of silicon nano-channels can be tuned for optimum performance using the source drain bias voltage, and is sensitive to urea at low concentration. The experimental results show a linear relationship between Surface potential change and urea Concentration in the range of 0.1-0.68 mM. The sensitivity Of Our devices shows high reproducibility with time and different measurement conditions. The nano-channel urea biosensor offers the possibility Of high quality, reusable enzyrne sensor array integration with silicon-based circuits. (C) 2008 Elsevier B.V. All rights reserved.

引用

收藏

页码：593 / 598

页数：6

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