Heteroepitaxy of PbS on porous silicon

被引:25
作者
Levchenko, VI
Postnova, LI
Bondarenko, VP
Vorozov, NN
Yakovtseva, VA
Dolgyi, LN
机构
[1] Belarussian State Univ Informat & Radioelect, Minsk 220027, BELARUS
[2] Inst Solid State Phys & Semicond, Minsk 220072, BELARUS
关键词
heteroepitaxy; PbS; porous silicon; molecular-beam epitaxy; buffer layers;
D O I
10.1016/S0040-6090(99)00052-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Epitaxial PbS films were grown by molecular-beam epitaxy (MBE) on the surface of porous silicon (PS) formed on the silicon substrate of (111) orientation. The uniform PS layers 5 mu m thick were produced by electrochemical anodic treatment of n(+)-silicon in HF solution. The structure of both PbS and buffer PS was studied by X-ray diffraction analysis as well as scanning electron microscopy. The PbS layer has been demonstrated to have a columnar structure at the early stages of growth, while a solid structure of the grown layer has been observed with increasing a thickness of the epitaxial layer up to 0.5-1.0 mu m. PbS epitaxial films grown on the substrates with the 2-5 mu m thick PS layers of 20-40% porosity were comparable with the films grown on the BaF2 substrates. (C) 1999 Elsevier Science S.A, All rights reserved.
引用
收藏
页码:141 / 144
页数:4
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