Periodic nano-structure formation with femtosecond laser ablation and patterning of silicon

被引：1

作者：

Xu, Jian-Ting ^{[1
]}

Yuan, Dong-Qing ^{[1
]}

机构：

[1] Huai Hai Inst Technol, Jiangsu Key Lab Marine Biotechnol, Lianyungang 222005, Jiangsu, Peoples R China

来源：

APPLIED MECHANICS AND MATERIALS I, PTS 1-3 | 2013年 / 275-277卷

关键词：

Femtosecond laser; patterning; ripples; Micro-structure;

D O I：

10.4028/www.scientific.net/AMM.275-277.2186

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Regular micro-apparatus which covered with periodic nano-hole, nano-ridge and ripple structures on silicon bulk were formed by laser micro-machining with tightly focused beam of the femtosecond laser with wavelength of 800 nm, repetition rate of 1 kHz and the pulse length of 130 fs in air. The periodic nano-hole structures which focus with a 20x focusing objective lens (NA = 0.4) is reported. Investigating the relationship between the width of structures and the speed of processing.

引用

页码：2186 / 2189

页数：4

共 9 条

[1] Laser-based microscale patterning of biodegradable polymers for biomedical applications [J].