A correct-by-construction approach to MEMS design and analysis

The need for general modeling and analysis tools for MEMS devices has been well established, and several software packages designed to address these needs have appeared in the last Eve years. While being powerful and comprehensive, existing tools often require specialized knowledge of the methods involved in the analysis (e.g., 3D modeling, mesh generation), and lack integration into a complete design environment. This paper describes a new MEMS design and analysis tool that uses a correct-by-construction approach in a tightly integrated environment of layout, 3D modeling, analysis, and system design. The MEMS design tool suite is integrated into an existing integrated circuit design package. Our goal is to automate as many steps of the process as possible, thus lowering the barrier to MEMS design. Device layout is created either manually, or using automatic layout generation macros, then a 3D model is automatically generated from the layout and a process description. Fully integrated finite and boundary element analysis allows the user to specify boundary conditions on the layout or on the 3D model, then automatic mesh generation is performed, taking advantage of the layered structure of the device to reduce mesh density in non-critical areas. Solvers include electrostatic, mechanical, and thermal, and well as coupled domain analysis. The design process ensures that the user does not create a device that cannot be fabricated. Libraries containing standard fabrication processes (e.g., MUMPS) and material properties will be available. Results of the analysis are passed to a behavioral Model Builder which then constructs high-level macro models using model order reduction, table construction and parameter extraction. These models can then be used in system simulations, allowing quick exploration of the design space and system verification.