A Finite Element Simulation of the Propagation Properties Shear Surface Acoustic Wave Devices

被引：1

作者：

Cao, Pei ^{[1
]}

Zhu, Jialin ^{[1
]}

Huang, Xiaolin ^{[1
]}

Gao, Jingmin ^{[1
]}

机构：

[1] Beijing Informat Sci & Technol Univ, Beijing Key Lab Sensor, Beijing, Peoples R China

来源：

2012 FIFTH INTERNATIONAL SYMPOSIUM ON COMPUTATIONAL INTELLIGENCE AND DESIGN (ISCID 2012), VOL 2 | 2012年

关键词：

shear SAW; Love wave; ST-90 degrees X quartz wafer; propagation properties; ANSYS simulation;

D O I：

10.1109/ISCID.2012.182

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

In this paper, the propagation properties of Love wave are analyzed from the wave equation of Love wave. According to the condition of generating Love wave, the model using ST-90 degrees X quartz wafer as substrate and SiO2 as overlay is simulated by ANSYS finite element software. The various velocities are calculated by the data of various modes, then the diagram of the velocity and frequency is drawn using the Lagrange interpolation function, which can prove the dispersion characteristics of Love wave. The Love wave device with 83MHz center frequency is designed according to the relationship between velocity and frequency, and its insertion loss is 10dB. The velocity of Love wave at 83MHz is calculated as 4922m/s according to the period of Interdigital transducer (IDT) and the amplitude-frequency characteristics measured by network analyzer, which is consistent with the simulation results.

引用

页码：119 / 122

页数：4

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