Hydrogel microvalve device modeling and simulation

被引：0

作者：

Ibrahim, MWA ^{[1
]}

Saunders, JR ^{[1
]}

Walied, M ^{[1
]}

机构：

[1] Univ Alberta, Multiphys & MEMS Simulat Lab, Edmonton, AB T6G 2G8, Canada

来源：

2005 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS | 2005年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The modeling and simulation of fabricated 3-D hybrid hydrogel microvalve using a commercial FE package is presented in this paper. A PDMS diaphragm is deflected to 197.5 mu m. A stimulated hydrogel volume swelled to 465% of its original volume. Results of the finite element analysis are reported and a comparison to the fabricated model results is made.

引用

页码：221 / 222

页数：2

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