Hydrogel microvalve device modeling and simulation

被引：0
|
作者：
Ibrahim, MWA [1 ]
Saunders, JR [1 ]
Walied, M [1 ]
机构：
[1] Univ Alberta, Multiphys & MEMS Simulat Lab, Edmonton, AB T6G 2G8, Canada
来源：
2005 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS | 2005年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The modeling and simulation of fabricated 3-D hybrid hydrogel microvalve using a commercial FE package is presented in this paper. A PDMS diaphragm is deflected to 197.5 mu m. A stimulated hydrogel volume swelled to 465% of its original volume. Results of the finite element analysis are reported and a comparison to the fabricated model results is made.
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页码：221 / 222
页数：2
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