Modified energetics and growth kinetics on H-terminated GaAs (110)

被引:2
作者
Galiana, B. [1 ,2 ]
Benedicto, M. [1 ]
Diez-Merino, L. [1 ]
Lorbek, S. [3 ]
Hlawacek, G. [3 ]
Teichert, C. [3 ]
Tejedor, P. [1 ]
机构
[1] CSIC, Inst Ciencia Mat Madrid, Madrid 28049, Spain
[2] Univ Carlos III Madrid, Dept Fis, Madrid 28911, Spain
[3] Univ Leoben, Inst Phys, A-8700 Leoben, Austria
关键词
HYDROGEN CHEMISORPTION; HOMOEPITAXIAL GROWTH; FORCE MICROSCOPY; ATOMIC-HYDROGEN; SURFACES; GAAS(110); EPITAXY; AS-2; AES;
D O I
10.1063/1.4826452
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Atomic hydrogen modification of the surface energy of GaAs (110) epilayers, grown at high temperatures from molecular beams of Ga and As-4, has been investigated by friction force microscopy (FFM). The reduction of the friction force observed with longer exposures to the H beam has been correlated with the lowering of the surface energy originated by the progressive de-relaxation of the GaAs (110) surface occurring upon H chemisorption. Our results indicate that the H-terminated GaAs (110) epilayers are more stable than the As-stabilized ones, with the minimum surface energy value of 31 meV/angstrom(2) measured for the fully hydrogenated surface. A significant reduction of the Ga diffusion length on the H-terminated surface irrespective of H coverage has been calculated from the FFM data, consistent with the layer-by-layer growth mode and the greater As incorporation coefficient determined from real-time reflection high-energy electron diffraction studies. Arsenic incorporation through direct dissociative chemisorption of single As-4 molecules mediated by H on the GaAs (110) surface has been proposed as the most likely explanation for the changes in surface kinetics observed. (C) 2013 AIP Publishing LLC.
引用
收藏
页数:7
相关论文
共 37 条
  • [1] HYDROGEN ON SEMICONDUCTOR SURFACES - THEORY OF THE ELECTRONIC-STRUCTURE
    BERTONI, CM
    FINOCCHI, F
    BERNARDINI, F
    NARDELLI, MB
    [J]. PHYSICA B-CONDENSED MATTER, 1991, 170 (1-4) : 429 - 435
  • [2] Bliss D. E., 1992, THESIS U CALIF, P61
  • [3] Atomic structure of misfit dislocations at InAs/GaAs(110)
    Choudhury, R.
    Bowler, D. R.
    Gillan, M. J.
    [J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 2008, 20 (23)
  • [4] Lateral force microscopy study of the frictional behavior of self-assembled monolayers of octadecyltrichlorosilane on silicon/silicon dioxide immersed in n-alcohols
    Clear, SC
    Nealey, PF
    [J]. LANGMUIR, 2001, 17 (03) : 720 - 732
  • [5] InGaAs/GaAs (110) quantum dot formation via step meandering
    Diez-Merino, Laura
    Tejedor, Paloma
    [J]. JOURNAL OF APPLIED PHYSICS, 2011, 110 (01)
  • [6] Step-step interactions on GaAs (110) nanopatterns
    Galiana, B.
    Benedicto, M.
    Tejedor, P.
    [J]. JOURNAL OF APPLIED PHYSICS, 2013, 113 (02)
  • [7] A density-functional based tight-binding approach to GaAs surface reconstructions
    Haugk, M
    Elsner, J
    Frauenheim, T
    [J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 1997, 9 (35) : 7305 - 7315
  • [8] Hirth J. P., 1963, PROGR MAT SCI, P87
  • [9] Hierarchy of adhesion forces in patterns of photoreactive surface layers
    Hlawacek, Gregor
    Shen, Quan
    Teichert, Christian
    Lex, Alexandra
    Trimmel, Gregor
    Kern, Wolfgang
    [J]. JOURNAL OF CHEMICAL PHYSICS, 2009, 130 (04)
  • [10] DIFFERENCES BETWEEN AS-2 AND AS-4 IN THE HOMOEPITAXIAL GROWTH OF GAAS(110) BY MOLECULAR-BEAM EPITAXY
    HOLMES, DM
    BELK, JG
    SUDIJONO, JL
    NEAVE, JH
    JONES, TS
    JOYCE, BA
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (19) : 2848 - 2850