Effective Photoluminescence in a Large-Area Array of Ta2O5 Nanodots

被引:13
作者
Devan, Rupesh S. [1 ]
Lin, Ching-Ling [1 ]
Lin, Jin-Han [1 ]
Wen, Teng-Kai [1 ]
Patil, Ranjit A. [1 ]
Ma, Yuan-Ron [1 ]
机构
[1] Natl Dong Hwa Univ, Dept Phys, Hualien 97401, Taiwan
关键词
Ta2O5; Nanodot; Hot Filament Metal Vapor Deposition; Raman Scattering; X-Ray Photoemission Spectroscopy (XPS); Photoluminescence (PL); Trap-Level; RAY PHOTOELECTRON-SPECTROSCOPY; RAMAN-SPECTROSCOPY; TANTALUM OXIDE; DEFECT STATES; THERMAL TA2O5; THIN-FILMS; PHOTOCONDUCTIVITY; DIFFRACTION; CAPACITORS; DEPOSITION;
D O I
10.1166/jnn.2013.6088
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We describe here the synthesis of a large-area Ta2O5 nanodot array by utilizing the hot filament metal vapor deposition technique. The Ta2O5 nanodots arranged in a large-area array on a Si wafer had an average diameter of similar to 8 nm. X-ray photoemission spectroscopy (XPS) revealed the stoichiometric Ta and O compositions of the Ta2O5 nanodots. Raman spectroscopy showed the Ta2O5 nanodots to be of orthorhombic (beta) crystal. Photoluminescence (PL) spectroscopy showed the green and red light emissions of the beta-Ta2O5 nanodots at room temperature.
引用
收藏
页码:1001 / 1005
页数:5
相关论文
共 36 条
[1]   Characterization of Ta2O5 thin films prepared by reactive evaporation [J].
Asghar, M. H. ;
Placido, F. ;
Naseem, S. .
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2006, 36 (02) :119-124
[2]   XPS study of N2 annealing effect on thermal Ta2O5 layers on Si [J].
Atanassova, E ;
Tyuliev, G ;
Paskaleva, A ;
Spassov, D ;
Kostov, K .
APPLIED SURFACE SCIENCE, 2004, 225 (1-4) :86-99
[3]   X-ray photoelectron spectroscopy of thermal thin Ta2O5 films on Si [J].
Atanassova, E ;
Spassov, D .
APPLIED SURFACE SCIENCE, 1998, 135 (1-4) :71-82
[4]   Thin RF sputtered and thermal Ta2O5 on Si for high density DRAM application [J].
Atanassova, E .
MICROELECTRONICS RELIABILITY, 1999, 39 (08) :1185-1217
[5]   Design and simulation of antireflection coating systems for optoelectronic devices: Application to silicon solar cells [J].
Bouhafs, D ;
Moussi, A ;
Chikouche, A ;
Ruiz, JM .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1998, 52 (1-2) :79-93
[6]   X-ray photoelectron spectroscopy study of Al/Ta2O5 and Ta2O5/Al buried interfaces [J].
Chen, K ;
Yang, GR ;
Nielsen, M ;
Lu, TM ;
Rymaszewski, EJ .
APPLIED PHYSICS LETTERS, 1997, 70 (03) :399-401
[7]   Improvements in anti-reflection coatings for high-efficiency silicon solar cells [J].
Cid, M ;
Stem, N ;
Brunetti, C ;
Beloto, AF ;
Ramos, CAS .
SURFACE & COATINGS TECHNOLOGY, 1998, 106 (2-3) :117-120
[8]   Two-dimensional single-crystalline Zn hexagonal nanoplates: Size-controllable synthesis and X-ray diffraction study [J].
Devan, Rupesh S. ;
Lin, Jin-Han ;
Huang, Yong-Jie ;
Yang, Chun-Chuen ;
Wu, Sheng Yun ;
Liou, Yung ;
Ma, Yuan-Ron .
NANOSCALE, 2011, 3 (10) :4339-4345
[9]   Enhancement of green-light photoluminescence of Ta2O5 nanoblock stacks [J].
Devan, Rupesh S. ;
Lin, Ching-Ling ;
Gao, Shun-Yu ;
Cheng, Chia-Liang ;
Liou, Yung ;
Ma, Yuan-Ron .
PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2011, 13 (29) :13441-13446
[10]   Electrochromic properties of large-area and high-density arrays of transparent one-dimensional β-Ta2O5 nanorods on indium-tin-oxide thin-films [J].
Devan, Rupesh S. ;
Gao, Shun-Yu ;
Ho, Wei-Der ;
Lin, Jin-Han ;
Ma, Yuan-Ron ;
Patil, Pramod S. ;
Liou, Yung .
APPLIED PHYSICS LETTERS, 2011, 98 (13)